Art
J-GLOBAL ID:200902138152842787   Reference number:98A0261476

Uniform RF Discharge Plasmas Produced by a Square Hollow Cathode with Tapered Shape.

テーパをつけた形状の正方形ホローカソードにより生成した一様なRF放電プラズマ
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Volume: 37  Issue: 1A/B  Page: L81-L84  Publication year: Jan. 15, 1998 
JST Material Number: F0599B  ISSN: 0021-4922  Document type: Article
Article type: 短報  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Gas discharges  ,  Plasma production and heating 
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