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J-GLOBAL ID：200902138393423106   Reference number：96A0068992

Use of low-temperature processing to deposit low-resistivity ITO films.

低比抵抗ITOの低温成膜
Author (2)：
SHIGESATO YUZO

About SHIGESATO YUZO

(東大 生産技研)

About 東大 生産技研

, 
YASUI ITARU

About YASUI ITARU

(東大 生産技研)

About 東大 生産技研


Material：
応用物理  (JSAP International)

About 応用物理


Volume： 64  Issue： 12  Page： 1225-1229  Publication year： Dec. 1995 
JST Material Number： F0252A  ISSN： 0369-8009  CODEN： OYBSA  Document type： Article
Article type： 解説  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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tin oxide

About tin oxide

,...
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JST classification (1)：
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Oxide thin films 
(BK14050P)

About Oxide thin films

Reference (39)：
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Terms in the title (4)：
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Keywords automatically extracted from the title.
比抵抗

About 比抵抗

, 
ITO

About ITO

, 
低温

About 低温

, 
成膜

About 成膜


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