Art
J-GLOBAL ID：200902139108966386   Reference number：02A0439844

小型電子ビーム励起プラズマ源の高出力化

Author (7)：
TANIGUCHI KAZUNARI

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(京都教大)

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, 
SHOYAMA HIROAKI

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(豊田工大)

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, 
OZAWA TATSUMA

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(京都教大)

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, 
NAKANO MAKIKO

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(京都教大)

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, 
KANEKO FUSAE

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(京都教大)

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, 
HAMAGAKI MANABU

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(理研)

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, 
HARA TAMIO

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(豊田工大)

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Material：
応用物理学関係連合講演会講演予稿集  (Extended Abstracts. Spring Meeting. Japan Society of Applied Physics and Related Societies)

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Volume： 49th  Issue： 1  Page： 138  Publication year： Mar. 27, 2002 
JST Material Number： Y0054A  Document type： Proceedings
Article type： 短報  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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*plasma source

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,...
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JST classification (1)：
JST classification
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Plasma devices 
(BJ02082I)

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Terms in the title (2)：
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プラズマ源

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, 
高出力化

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