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J-GLOBAL ID：200902139297110020   Reference number：99A0162382

Deposition method using an ultrafine particle beam and its application to microfabrication.

超微粒子ビームによる成膜法と微細加工への展開
Author (1)：
AKEDO JUN

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(機械技研)

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Material：
応用物理  (JSAP International)

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Volume： 68  Issue： 1  Page： 44-47  Publication year： Jan. 1999 
JST Material Number： F0252A  ISSN： 0369-8009  CODEN： OYBSA  Document type： Article
Article type： 解説  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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*ultrafine particle

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,...
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Thesaurus term/Semi thesaurus term
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*PZT

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JST classification (1)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
(NC03030V)

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Reference (13)：
  • SHELTON, H. J.Appl.Phys. 1960, 31, 1243
  • 津和秀夫. 精密機械. 1972, 38, 37
  • 井出敬. 精密工学学会誌. 1991, 57, 143
  • 林主税. 超微粒子. 1988
  • KASYU, S. Jpn.J.Appl.Phys. 1984, 23, L910
ｍore...
Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
超微粒子

About 超微粒子

, 
ビーム

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, 
成膜

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, 
微細加工

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, 
展開

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