Photo atomic layer deposition of transparent conductive ZnO films.

SAITO K; WATANABE Y; TAKAHASHI K; MATSUZAWA T; SANG B; KONAGAI M

Art

J-GLOBAL ID：200902139383700078 Reference number：98A0041486

Photo atomic layer deposition of transparent conductive ZnO films.

透明導電性ZnO膜の光原子層堆積

Publisher site Copy service {{ this.onShowCLink("http://jdream3.com/copy/?sid=JGLOBAL&noSystem=1&documentNoArray=98A0041486&COPY=1") }}
Access JDreamⅢ for advanced search and analysis. {{ this.onShowJLink("http://jdream3.com/lp/jglobal/index.html?docNo=98A0041486&from=J-GLOBAL&jstjournalNo=D0513C") }}

Author (6)： , , , , ,
Material：
Volume： 49 Issue： 1/4 Page： 187-193 Publication year： Dec. 1997
JST Material Number： D0513C ISSN： 0927-0248 Document type： Article
Article type：原著論文 Country of issue： Netherlands (NLD) Language： ENGLISH (EN)

,...

To see more with JDream III (charged). {{ this.onShowAbsJLink("http://jdream3.com/lp/jglobal/index.html?docNo=98A0041486&from=J-GLOBAL&jstjournalNo=D0513C") }}

Oxide thin films

, ,

Return to Previous Page