Art
J-GLOBAL ID：200902139480303229   Reference number：02A0226490

ナノ微粒子製造法と利用技術 炭素超微粒子の静電加速を利用するダイヤモンド状カーボン膜(DLC膜)形成法

Author (1)：
IDE TAKASHI

About IDE TAKASHI

(愛媛大 工)

About 愛媛大 工


Material：
科学と工業  (Science and Industry)

About 科学と工業


Volume： 76  Issue： 2  Page： 72-78  Publication year： Feb. 20, 2002 
JST Material Number： F0106A  ISSN： 0368-5918  CODEN： KKGOAG  Document type： Article
Article type： 解説  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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*DLC film

About DLC film

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
静電加速

About 静電加速


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JST classification (2)：
JST classification
Category name(code) classified by JST.
Thin films of other inorganic compounds 
(BK14060A)

About Thin films of other inorganic compounds

,  Mechanical properties of solids in general 
(BL01021C)

About Mechanical properties of solids in general

Terms in the title (8)：
Terms in the title
Keywords automatically extracted from the title.
ナノ微粒子

About ナノ微粒子

, 
製造法

About 製造法

, 
炭素

About 炭素

, 
超微粒子

About 超微粒子

, 
加速

About 加速

, 
ダイヤモンド

About ダイヤモンド

, 
カーボン膜

About カーボン膜

, 
DLC膜

About DLC膜


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