Art
J-GLOBAL ID：200902140084893305   Reference number：01A0554555

Measurement of Binary Gas Concentration with Quartz Gauge.

水晶摩擦真空計を用いた2成分混合気体の濃度計測
Author (4)：
KUROKAWA AKIRA

About KUROKAWA AKIRA

(産業技総研)

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, 
ICHIMURA SHINGO

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(産業技総研)

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, 
NONAKA HIDEHIKO

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(産業技総研)

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, 
HOJO HISAO

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(バキュームプロダクツ)

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Material：
真空  (Journal of the Vacuum Society of Japan)

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Volume： 44  Issue： 3  Page： 167-170  Publication year： Mar. 20, 2001 
JST Material Number： G0194A  ISSN： 0559-8516  CODEN： SHINA  Document type： Article
Article type： 短報  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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*mixed gas

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,...
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Thesaurus term/Semi thesaurus term
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水晶摩擦真空計

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,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Vacuum production and techniques 
(BA02020L)

About Vacuum production and techniques

Reference (2)：
  • 国分清秀. 真空. 1986, 29, 33
  • GC-210クリスタルゲージ取扱説明書
Terms in the title (6)：
Terms in the title
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水晶

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, 
摩擦

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, 
真空計

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, 
2成分

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, 
混合気体

About 混合気体

, 
濃度計測

About 濃度計測


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