Art
J-GLOBAL ID：200902140142777884   Reference number：97A0720181

Chemomechanical Polishing of Silicon Carbide.

炭化けい素の化学的機械的研磨
Author (4)：
ZHOU L

About ZHOU L

(Case Western Reserve Univ., Ohio, USA)

About Case Western Reserve Univ., Ohio, USA

, 
AUDURIER V

About AUDURIER V

(Case Western Reserve Univ., Ohio, USA)

About Case Western Reserve Univ., Ohio, USA

, 
PIROUZ P

About PIROUZ P

(Case Western Reserve Univ., Ohio, USA)

About Case Western Reserve Univ., Ohio, USA

, 
POWELL J A

About POWELL J A

(NASA Lewis Res. Center, Ohio, USA)

About NASA Lewis Res. Center, Ohio, USA


Material：
Journal of the Electrochemical Society  (J Electrochem Soc)

About Journal of the Electrochemical Society


Volume： 144  Issue： 6  Page： L161-L163  Publication year： Jun. 1997 
JST Material Number： C0285A  ISSN： 1945-7111  CODEN： JESOAN  Document type： Article
Article type： 短報  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
silicon carbide

About silicon carbide

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
silica

About silica

,...
   To see more with JDream III (charged).   {{ this.onShowAbsJLink("http://jdream3.com/lp/jglobal/index.html?docNo=97A0720181&from=J-GLOBAL&jstjournalNo=C0285A") }}
JST classification (3)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

,  Thin films of other inorganic compounds 
(BK14060A)

About Thin films of other inorganic compounds

,  Salts 
(CD01050V)

About Salts

Terms in the title (2)：
Terms in the title
Keywords automatically extracted from the title.
炭化けい素

About 炭化けい素

, 
化学的機械的研磨

About 化学的機械的研磨


Return to Previous Page

TOP

BOTTOM