Art
J-GLOBAL ID:200902140142777884   Reference number:97A0720181

Chemomechanical Polishing of Silicon Carbide.

炭化けい素の化学的機械的研磨
Author (4):
Material:
Volume: 144  Issue:Page: L161-L163  Publication year: Jun. 1997 
JST Material Number: C0285A  ISSN: 1945-7111  CODEN: JESOAN  Document type: Article
Article type: 短報  Country of issue: United States (USA)  Language: ENGLISH (EN)
Thesaurus term:
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
,...
Semi thesaurus term:
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
,...
   To see more with JDream III (charged).   {{ this.onShowAbsJLink("http://jdream3.com/lp/jglobal/index.html?docNo=97A0720181&from=J-GLOBAL&jstjournalNo=C0285A") }}
JST classification (3):
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices  ,  Thin films of other inorganic compounds  ,  Salts 
Terms in the title (2):
Terms in the title
Keywords automatically extracted from the title.

Return to Previous Page