Art

J-GLOBAL ID：200902140453855609   Reference number：94A0625504

Comparison measurement in the hundred nanometer range with a crystalline lattice using a dual tunneling-unit scanning tunneling microscope.

Author (7)： KAWAKATSU H (Univ. Tokyo, Tokyo, JPN) ,  HIGUCHI T (Univ. Tokyo, Tokyo, JPN) ,  KOUGAMI H (Univ. Tokyo, Tokyo, JPN) ,  KAWAI M (Univ. Tokyo, Tokyo, JPN) ,  WATANABE M (Univ. Tokyo, Tokyo, JPN) ,  HOSHI Y (Univ. Tokyo, Tokyo, JPN) ,  NISHIOKI N (Univ. Tokyo, Tokyo, JPN)
Material： Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures  (Journal of Vacuum Science & Technology. B. Microelectronics Processing and Phenomena)
Volume： 12  Issue： 3  Page： 1681-1685  Publication year： May. 1994 
JST Material Number： E0974A  ISSN： 1071-1023  CODEN： JVTBD9  Document type： Article
Country of issue： United States (USA)  Language： ENGLISH (EN)