Art
J-GLOBAL ID：200902140953965850   Reference number：95A0834693

Fabrication of nanostructures using atomic-force-microscope-based lithography.

原子間力顕微鏡に基づくリソグラフィーを用いたナノ構造の作製
Author (2)：
SOHN L L

About SOHN L L

(AT&T Bell Lab., New Jersey)

About AT&T Bell Lab., New Jersey

, 
WILLETT R L

About WILLETT R L

(AT&T Bell Lab., New Jersey)

About AT&T Bell Lab., New Jersey


Material：
Applied Physics Letters  (Appl Phys Lett)

About Applied Physics Letters


Volume： 67  Issue： 11  Page： 1552-1554  Publication year： Sep. 11, 1995 
JST Material Number： H0613A  ISSN： 0003-6951  CODEN： APPLAB  Document type： Article
Article type： 短報  Country of issue： United States (USA)  Language： ENGLISH (EN)
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All keywords is available on JDreamIII(charged).
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ridging (soil preparation)

About ridging (soil preparation)

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Metallic thin films 
(BK14030T)

About Metallic thin films

,  Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
原子間力顕微鏡

About 原子間力顕微鏡

, 
リソグラフィー

About リソグラフィー

, 
ナノ構造

About ナノ構造

, 
作製

About 作製


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