Site-Selective Deposition and Micropatterning of SrTiO<sub>3</sub> Thin Film on Self-Assembled Monolayers by the Liquid Phase Deposition Method.

GAO Y; MASUDA Y; YONEZAWA T; KOUMOTO K

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J-GLOBAL ID：200902140960882413 Reference number：03A0094761

Site-Selective Deposition and Micropatterning of SrTiO₃ Thin Film on Self-Assembled Monolayers by the Liquid Phase Deposition Method.

自己組織化単分子層上の液相堆積法によるSrTiO₃薄膜のサイト選択性堆積とマイクロパターン形成

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Material：
Volume： 14 Issue： 12 Page： 5006-5014 Publication year： Dec. 2002
JST Material Number： T0893A ISSN： 0897-4756 CODEN： CMATEX Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Metal-insulator-semiconductor structures , Oxide thin films

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Site-Selective Deposition and Micropatterning of SrTiO3 Thin Film on Self-Assembled Monolayers by the Liquid Phase Deposition Method.

Site-Selective Deposition and Micropatterning of SrTiO₃ Thin Film on Self-Assembled Monolayers by the Liquid Phase Deposition Method.