Optical patterning of GaN films.

KELLY M K; AMBACHER O; DAHLHEIMER B; GROOS G; DIMITROV R; ANGERER H; STUTZMANN M

Art

J-GLOBAL ID：200902141586440700 Reference number：96A0855830

Optical patterning of GaN films.

GaN膜の光学的パターニング

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Author (7)： , , , , , ,
Material：
Volume： 69 Issue： 12 Page： 1749-1751 Publication year： Sep. 16, 1996
JST Material Number： H0613A ISSN： 0003-6951 CODEN： APPLAB Document type： Article
Article type：短報 Country of issue： United States (USA) Language： ENGLISH (EN)

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Techniques for samples , Manufacturing technology of solid-state devices

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