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J-GLOBAL ID:200902141832103955   Reference number:01A0283088

Studies on reactive sputtering process of TiN films using small mass analyzers.

小型質量分析計を用いたTiN膜の反応性スパッタリング過程の追跡
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Material:
Volume: 169/170  Page: 757-762  Publication year: Jan. 15, 2001 
JST Material Number: B0707B  ISSN: 0169-4332  Document type: Article
Article type: 原著論文  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Thin films of other inorganic compounds  ,  Mass spectrometry 
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