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J-GLOBAL ID:200902142149170538   Reference number:02A0646346

PSII法による細管内壁へのDLCコーティング

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Volume: 18  Issue:Page: 36-37  Publication year: Jul. 25, 2002 
JST Material Number: X0341A  ISSN: 1340-4792  Document type: Article
Article type: 解説  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Carbon and its compounds  ,  Applications of plasma 
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