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J-GLOBAL ID:200902142569547793   Reference number:97A0276385

Optical Process for Liftoff of Group III-Nitride Films.

III族窒化膜のリフトオフの光学プロセス
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Volume: 159  Issue:Page: R3-R4  Publication year: Jan. 16, 1997 
JST Material Number: D0774A  ISSN: 0031-8965  Document type: Article
Article type: 短報  Country of issue: Germany, Federal Republic of (DEU)  Language: ENGLISH (EN)
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Manufacturing technology of solid-state devices 
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