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J-GLOBAL ID:200902142746216891   Reference number:02A0833561

Plume dynamics during film and nanoparticles deposition by pulsed laser ablation.

パルスレーザアブレーションによる膜及びナノ粒子堆積中のプルーム動力学
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Volume: 302  Issue:Page: 182-189  Publication year: Sep. 23, 2002 
JST Material Number: C0600B  ISSN: 0375-9601  Document type: Article
Article type: 短報  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Techniques and equipment of thin film deposition 
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