Plume dynamics during film and nanoparticles deposition by pulsed laser ablation.

HAN M; GONG Y; ZHOU J; YIN C; SONG F; MUTO N; TAKIYA T; IWATA Y

Art

J-GLOBAL ID：200902142746216891 Reference number：02A0833561

Plume dynamics during film and nanoparticles deposition by pulsed laser ablation.

パルスレーザアブレーションによる膜及びナノ粒子堆積中のプルーム動力学

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Material：
Volume： 302 Issue： 4 Page： 182-189 Publication year： Sep. 23, 2002
JST Material Number： C0600B ISSN： 0375-9601 Document type： Article
Article type：短報 Country of issue： Netherlands (NLD) Language： ENGLISH (EN)

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Techniques and equipment of thin film deposition

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