Optical Proximity Correction for Super Resolution Technique.

KAMON K; WAKAMIYA W; NAGATA H; MORIIZUMI K; MIYAMOTO T; MYOI Y; TANAKA M

Art

J-GLOBAL ID：200902143085464881 Reference number：95A0878024

Optical Proximity Correction for Super Resolution Technique.

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Author (7)： , , , , , ,
Material：
Volume： 2512 Page： 491-502 Publication year： 1995
JST Material Number： D0943A ISSN： 0277-786X CODEN： PSISDG Document type： Proceedings
Country of issue： United States (USA) Language： ENGLISH (EN)

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