Art
J-GLOBAL ID：200902143312823818   Reference number：00A0223372

Structure and stability of ultrathin zirconium oxide layers on Si(001).

Si(001)上の酸化ジルコニウム超薄膜の構造及び安定性
Author (3)：
COPEL M

About COPEL M

(IBM Res. Div., New York)

About IBM Res. Div., New York

, 
GRIBELYUK M

About GRIBELYUK M

(IBM Analytical Serv., New York)

About IBM Analytical Serv., New York

, 
GUSEV E

About GUSEV E

(IBM Res. Div., New York)

About IBM Res. Div., New York


Material：
Applied Physics Letters  (Appl Phys Lett)

About Applied Physics Letters


Volume： 76  Issue： 4  Page： 436-438  Publication year： Jan. 24, 2000 
JST Material Number： H0613A  ISSN： 0003-6951  CODEN： APPLAB  Document type： Article
Article type： 短報  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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ultrathin film

About ultrathin film

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Oxide thin films 
(BK14050P)

About Oxide thin films

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
Si

About Si

, 
酸化ジルコニウム

About 酸化ジルコニウム

, 
超薄膜

About 超薄膜

, 
安定性

About 安定性


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