Art
J-GLOBAL ID：200902143467164691   Reference number：02A0786705

Electrorheological fluid-assisted ultra-precision polishing for small three-dimensional parts.

小さな三次元部品の電気粘性流体支援による超精密研磨
Author (3)：
KURIYAGAWA T

About KURIYAGAWA T

(Tohoku Univ., Sendai, JPN)

About Tohoku Univ., Sendai, JPN

, 
SAEKI M

About SAEKI M

(Olympus Optical Co., Ltd., Tokyo, JPN)

About Olympus Optical Co., Ltd., Tokyo, JPN

, 
SYOJI K

About SYOJI K

(Tohoku Univ., Sendai, JPN)

About Tohoku Univ., Sendai, JPN


Material：
Precision Engineering  (Precis Eng)

About Precision Engineering


Volume： 26  Issue： 4  Page： 370-380  Publication year： Oct. 2002 
JST Material Number： A0734B  ISSN： 0141-6359  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
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fine patterning

About fine patterning

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
electrorheological fluid

About electrorheological fluid


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JST classification (1)：
JST classification
Category name(code) classified by JST.
Grinding 
(QC03000R)

About Grinding

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
電気粘性流体

About 電気粘性流体

, 
支援

About 支援

, 
超精密研磨

About 超精密研磨


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