Art
J-GLOBAL ID：200902144115318687   Reference number：96A0520868

Bonding characterization of BC2N thin films.

BC2N薄膜の結合のキャラクタリゼーション
Author (4)：
WATANABE M O

About WATANABE M O

(Toshiba Corp., Kawasaki, JPN)

About Toshiba Corp., Kawasaki, JPN

, 
ITOH S

About ITOH S

(Toshiba Corp., Kawasaki, JPN)

About Toshiba Corp., Kawasaki, JPN

, 
MIZUSHIMA K

About MIZUSHIMA K

(Toshiba Corp., Kawasaki, JPN)

About Toshiba Corp., Kawasaki, JPN

, 
SASAKI T

About SASAKI T

(National Inst. Res. Inorganic Materials, Ibaraki, JPN)

About National Inst. Res. Inorganic Materials, Ibaraki, JPN


Material：
Applied Physics Letters  (Appl Phys Lett)

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Volume： 68  Issue： 21  Page： 2962-2964  Publication year： May. 20, 1996 
JST Material Number： H0613A  ISSN： 0003-6951  CODEN： APPLAB  Document type： Article
Article type： 短報  Country of issue： United States (USA)  Language： ENGLISH (EN)
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semiconductor thin film

About semiconductor thin film

,...
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JST classification (1)：
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Semiconductor thin films 
(BK14040E)

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Terms in the title (2)：
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薄膜

About 薄膜

, 
キャラクタリゼーション

About キャラクタリゼーション


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