Optical Proximity Correction, a First Look at Manufacturability.

LIEBMANN L W; GRENON B; LAVIN M; SCHOMODY S; ZELL T

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J-GLOBAL ID：200902144313445031 Reference number：95A0575600

Optical Proximity Correction, a First Look at Manufacturability.

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Author (5)： , , , ,
Material：
Volume： 2322 Page： 229-238 Publication year： 1994
JST Material Number： D0943A ISSN： 0277-786X CODEN： PSISDG Document type： Proceedings
Country of issue： United States (USA) Language： ENGLISH (EN)

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