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J-GLOBAL ID:200902144846459247   Reference number:94A0318690

Micromachine Technology in the Industrial Science and Technology Frontier Program.

産業科学技術研究開発制度における「マイクロマシン技術」
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Volume: 97  Issue: 905  Page: 268-271  Publication year: Apr. 1994 
JST Material Number: F0228A  ISSN: 0021-4728  CODEN: NKGKA  Document type: Article
Article type: 解説  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Research and development 
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