Art
J-GLOBAL ID：200902144913838851   Reference number：02A0862291

On-Chip Actuation of an In-Plane Compliant Bistable Micromechanism.

面内追従型双安定マイクロ機構のチップ上作動
Author (2)：
BAKER M S

About BAKER M S

(Brigham Young Univ.., UT, USA)

About Brigham Young Univ.., UT, USA

, 
HOWELL L L

About HOWELL L L

(Brigham Young Univ.., UT, USA)

About Brigham Young Univ.., UT, USA


Material：
Journal of Microelectromechanical Systems  (J Microelectromechanical Syst)

About Journal of Microelectromechanical Systems


Volume： 11  Issue： 5  Page： 566-573  Publication year： Oct. 2002 
JST Material Number： W0357A  ISSN： 1057-7157  CODEN： JMIYET  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
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All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*microswitch

About microswitch

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Relays and switches 
(NA05060K)

About Relays and switches

Terms in the title (2)：
Terms in the title
Keywords automatically extracted from the title.
双安定

About 双安定

, 
マイクロ

About マイクロ


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