Art
J-GLOBAL ID：200902144951253573   Reference number：01A0283038

ZnO thin films deposited on various LiNbO3 substrates by RF-sputtering.

高周波スパッタリングにより種々のLiNbO3基板上に堆積したZnO薄膜
Author (3)：
YAMAMOTO H

About YAMAMOTO H

(Yonago National Coll. Technol., Tottori, JPN)

About Yonago National Coll. Technol., Tottori, JPN

, 
SAIGA N

About SAIGA N

(Yonago National Coll. Technol., Tottori, JPN)

About Yonago National Coll. Technol., Tottori, JPN

, 
NISHIMORI K

About NISHIMORI K

(Tottori Univ., Tottori, JPN)

About Tottori Univ., Tottori, JPN


Material：
Applied Surface Science  (Appl Surf Sci)

About Applied Surface Science


Volume： 169/170  Page： 517-520  Publication year： Jan. 15, 2001 
JST Material Number： B0707B  ISSN： 0169-4332  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
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All keywords is available on JDreamIII(charged).
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*sputtered deposition

About sputtered deposition

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Oxide thin films 
(BK14050P)

About Oxide thin films

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
高周波スパッタリング

About 高周波スパッタリング

, 
堆積

About 堆積

, 
ZnO薄膜

About ZnO薄膜


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