Art
J-GLOBAL ID：200902145104629873   Reference number：95A0218725

Effect of Surface Roughness of Substrates on Residual Stress of TiN Coating.

TiN被覆材料の残留応力に及ぼす基板表面粗さの影響
Author (2)：
CHIBA YUJI

About CHIBA YUJI

(住友金属鉱山 中研)

About 住友金属鉱山 中研

, 
ICHIMURA HIROSHI

About ICHIMURA HIROSHI

(住友金属鉱山 中研)

About 住友金属鉱山 中研


Material：
日本セラミックス協会学術論文誌  (Journal of the Ceramic Society of Japan)

About 日本セラミックス協会学術論文誌


Volume： 103  Issue： 2  Page： 162-166  Publication year： Feb. 1995 
JST Material Number： F0382A  ISSN： 0914-5400  CODEN： JCSJEW  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
Thesaurus term：
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titanium compound

About titanium compound

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Ceramic coating to metallic materials 
(YC02050V)

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Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
TiN被覆

About TiN被覆

, 
残留応力

About 残留応力

, 
表面粗さ

About 表面粗さ


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