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J-GLOBAL ID：200902146212873744   Reference number：96A0568519

Vapour phase deposition of cubic boron nitride.

立方晶窒化ほう素の気相蒸着
Author (1)：
YOSHIDA T

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(Univ. Tokyo, Tokyo, JPN)

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Material：
Diamond and Related Materials  (Diam Relat Mater)

About Diamond and Related Materials


Volume： 5  Issue： 3/5  Page： 501-507  Publication year： Apr. 1996 
JST Material Number： W0498A  ISSN： 0925-9635  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
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new ceramics

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,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Manufacturing of ceramics and ceramic whiteware 
(YC03020V)

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,  Techniques and equipment of thin film deposition 
(BK14020I)

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立方晶窒化ほう素

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, 
気相蒸着

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