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J-GLOBAL ID:200902146212873744   Reference number:96A0568519

Vapour phase deposition of cubic boron nitride.

立方晶窒化ほう素の気相蒸着
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Volume:Issue: 3/5  Page: 501-507  Publication year: Apr. 1996 
JST Material Number: W0498A  ISSN: 0925-9635  Document type: Article
Article type: 原著論文  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Manufacturing of ceramics and ceramic whiteware  ,  Techniques and equipment of thin film deposition 
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