Art
J-GLOBAL ID:200902146423324526   Reference number:94A0233596

On the influence of excited atoms on the electron kinetics of a surface wave sustained argon plasma.

表面波維持アルゴンプラズマの電子の運動力学への励起原子の影響
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Material:
Volume:Issue:Page: 80-87  Publication year: Feb. 1994 
JST Material Number: W0479A  ISSN: 0963-0252  CODEN: PSTEEU  Document type: Article
Article type: 原著論文  Country of issue: United Kingdom (GBR)  Language: ENGLISH (EN)
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Category name(code) classified by JST.
Plasma in general 

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