Art
J-GLOBAL ID：200902146734176253   Reference number：01A0017379

VHF Free-Free Beam High-Q Micromechanical Resonators.

VHF両端自由はり高Qマイクロ振動子
Author (3)：
WANG K

About WANG K

(Univ. Michigan at Ann Arbor, MI, USA)

About Univ. Michigan at Ann Arbor, MI, USA

, 
WONG A-C

About WONG A-C

(Univ. Michigan at Ann Arbor, MI, USA)

About Univ. Michigan at Ann Arbor, MI, USA

, 
NGUYEN C T-C

About NGUYEN C T-C

(Univ. Michigan at Ann Arbor, MI, USA)

About Univ. Michigan at Ann Arbor, MI, USA


Material：
Journal of Microelectromechanical Systems  (J Microelectromechanical Syst)

About Journal of Microelectromechanical Systems


Volume： 9  Issue： 3  Page： 347-360  Publication year： Sep. 2000 
JST Material Number： W0357A  ISSN： 1057-7157  CODEN： JMIYET  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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Q-value

About Q-value

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Excitation,generation and measurements of vibrations 
(BB02030Z)

About Excitation,generation and measurements of vibrations

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
VHF

About VHF

, 
はり

About はり

, 
マイクロ

About マイクロ

, 
振動子

About 振動子


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