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J-GLOBAL ID:200902146753315167   Reference number:01A0730651

ナノメータレベル回転精度を目指して 動圧軸受の現状と将来

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Volume: 67  Issue:Page: 1080-1082  Publication year: Jul. 05, 2001 
JST Material Number: F0268A  ISSN: 0912-0289  Document type: Article
Article type: 解説  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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