About SEKINE K
About Tohoku Univ., Sendai, JPN
About SAITO Y
About Tohoku Univ., Sendai, JPN
About HIRAYAMA M
About Tohoku Univ., Sendai, JPN
About OHMI T
About Tohoku Univ., Sendai, JPN
About IEEE Transactions on Electron Devices
About semiconductor process
About plasma treatment
About Manufacturing technology of solid-state devices
About Oxide thin films
About Kr
About プラズマ
About 酸素ラジカル
About 高信頼性
About シリコン酸化膜
About 低温形成