Art
J-GLOBAL ID：200902148210410022   Reference number：01A0333993

Selective deposition and micropatterning of titanium dioxide thin film on self-assembled monolayers.

自己集合単分子層上の二酸化チタン薄膜の選択堆積とマイクロパターン形成
Author (5)：
MASUDA Y

About MASUDA Y

(Nagoya Univ., Nagoya, JPN)

About Nagoya Univ., Nagoya, JPN

, 
SUGIYAMA T

About SUGIYAMA T

(Nagoya Univ., Nagoya, JPN)

About Nagoya Univ., Nagoya, JPN

, 
LIN H

About LIN H

(KRI, Kyoto, JPN)

About KRI, Kyoto, JPN

, 
SEO W S

About SEO W S

(Nagoya Univ., Nagoya, JPN)

About Nagoya Univ., Nagoya, JPN

, 
KOUMOTO K

About KOUMOTO K

(Nagoya Univ., Nagoya, JPN)

About Nagoya Univ., Nagoya, JPN


Material：
Thin Solid Films

About Thin Solid Films


Volume： 382  Issue： 1/2  Page： 153-157  Publication year： Feb. 01, 2001 
JST Material Number： B0899A  ISSN： 0040-6090  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*self organization system

About self organization system

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
マイクロデバイス

About マイクロデバイス


   To see more with JDream III (charged).   {{ this.onShowAbsJLink("http://jdream3.com/lp/jglobal/index.html?docNo=01A0333993&from=J-GLOBAL&jstjournalNo=B0899A") }}
JST classification (2)：
JST classification
Category name(code) classified by JST.
Oxide thin films 
(BK14050P)

About Oxide thin films

,  Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

Substance index (2)：
Substance index
Chemical Substance indexed to the Article.
Dichlorodiethoxytitanium(IV)

About Dichlorodiethoxytitanium(IV)

, 
Octadecyltrichlorosilane

About Octadecyltrichlorosilane

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
自己集合単分子層

About 自己集合単分子層

, 
二酸化チタン薄膜

About 二酸化チタン薄膜

, 
堆積

About 堆積

, 
マイクロパターン形成

About マイクロパターン形成


Return to Previous Page

TOP

BOTTOM