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J-GLOBAL ID:200902148523485562   Reference number:98A0335613

The use of refractive index as a measure of diamond-like carbon film quality.

ダイヤモンド状炭素膜の品質指標としての屈折率
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Volume:Issue: 2/5  Page: 432-434  Publication year: Feb. 1998 
JST Material Number: W0498A  ISSN: 0925-9635  Document type: Article
Article type: 原著論文  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Semiconductor thin films 
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