Double textured cylindrical block copolymer domains via directional solidification on a topographically patterned substrate.

PARK C; CHENG J Y; FASOLKA M J; MAYES A M; ROSS C A; THOMAS E L; DE ROSA C

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J-GLOBAL ID：200902149572115394 Reference number：01A0835775

Double textured cylindrical block copolymer domains via directional solidification on a topographically patterned substrate.

トポグラフィカルにパターン形成した基板上の一方向固化による二重テクスチャ円筒形ブロック共重合体ドメイン

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Material：
Volume： 79 Issue： 6 Page： 848-850 Publication year： Aug. 06, 2001
JST Material Number： H0613A ISSN： 0003-6951 CODEN： APPLAB Document type： Article
Article type：短報 Country of issue： United States (USA) Language： ENGLISH (EN)

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Thin films of organic compounds , Manufacturing technology of solid-state devices

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