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J-GLOBAL ID：200902149642961700   Reference number：94A0368830

Nanoindentation hardness measurements using atomic force microscopy.

原子間力顕微鏡を利用したナノ押込硬さ測定
Author (2)：
BHUSHAN B

About BHUSHAN B

(Ohio State Univ., Ohio)

About Ohio State Univ., Ohio

, 
KOINKAR V N

About KOINKAR V N

(Ohio State Univ., Ohio)

About Ohio State Univ., Ohio


Material：
Applied Physics Letters  (Appl Phys Lett)

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Volume： 64  Issue： 13  Page： 1653-1655  Publication year： Mar. 28, 1994 
JST Material Number： H0613A  ISSN： 0003-6951  CODEN： APPLAB  Document type： Article
Article type： 短報  Country of issue： United States (USA)  Language： ENGLISH (EN)
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silicon

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,...
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JST classification (1)：
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Mechanical properties of solids in general 
(BL01021C)

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Terms in the title (2)：
Terms in the title
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原子間力顕微鏡

About 原子間力顕微鏡

, 
押込硬さ

About 押込硬さ


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