Art
J-GLOBAL ID:200902149904155964   Reference number:98A0445996

Impurity Diffusion in β-SIC.

β-SiC中の不純物拡散
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Volume: 18th  Page: 189-192  Publication year: 1997 
JST Material Number: X0031A  ISSN: 0911-1743  Document type: Proceedings
Article type: 原著論文  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Diffusion in solids in general 
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