Art
J-GLOBAL ID：200902149904155964   Reference number：98A0445996

Impurity Diffusion in β-SIC.

β-SiC中の不純物拡散
Author (3)：
TAKANO K

About TAKANO K

(Tohoku Univ., Sendai, JPN)

About Tohoku Univ., Sendai, JPN

, 
YAMADA K

About YAMADA K

(Hakodate National Coll. Technol., Hakodate, JPN)

About Hakodate National Coll. Technol., Hakodate, JPN

, 
IIJIMA Y

About IIJIMA Y

(Tohoku Univ., Sendai, JPN)

About Tohoku Univ., Sendai, JPN


Material：
Thermophysical Properties  (Proceedings of Japan Symposium on Thermophysical Properties)

About Thermophysical Properties


Volume： 18th  Page： 189-192  Publication year： 1997 
JST Material Number： X0031A  ISSN： 0911-1743  Document type： Proceedings
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)
Thesaurus term：
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All keywords is available on JDreamIII(charged).
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volume diffusion

About volume diffusion

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Diffusion in solids in general 
(BL06021L)

About Diffusion in solids in general

Terms in the title (2)：
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SiC

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, 
不純物拡散

About 不純物拡散


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