About LARSEN U D
About Technical Univ. Denmark, Lyngby, DNK
About SIGMUND O
About Technical Univ. Denmark, Lyngby, DNK
About BOUWSTRA S
About Technical Univ. Denmark, Lyngby, DNK
About Journal of Microelectromechanical Systems
About micromachining
About topology
About Manufacturing technology of solid-state devices
About ポアソン比
About ばね
About マイクロ
About 設計