Art
J-GLOBAL ID：200902151034236046   Reference number：00A0413136

Experimental Study of Hydrogen-free DLC film Deposition by XeCl(308nm) pulsed laser ablation.

XeCl(308nm)パルスレーザアブレーションによる水素フリーDLCの薄膜蒸着実験
Author (3)：
LI T-J

About LI T-J

(Northwest Inst. Nuclear Technol., Xi’an, CHN)

About Northwest Inst. Nuclear Technol., Xi’an, CHN

, 
LIU J-R

About LIU J-R

(Northwest Inst. Nuclear Technol., Xi’an, CHN)

About Northwest Inst. Nuclear Technol., Xi’an, CHN

, 
WANG L-G

About WANG L-G

(Northwest Inst. Nuclear Technol., Xi’an, CHN)

About Northwest Inst. Nuclear Technol., Xi’an, CHN


Material：
Proceedings of SPIE  (Proceedings. SPIE - The International Society for Optical Engineering)

About Proceedings of SPIE


Volume： 3885  Page： 323-330  Publication year： 2000 
JST Material Number： D0943A  ISSN： 0277-786X  CODEN： PSISDG  Document type： Proceedings
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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xenon compound

About xenon compound

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Laser irradiation effects and damages 
(BK16040S)

About Laser irradiation effects and damages

,  Inorganic compounds and elements in general 
(CD01010D)

About Inorganic compounds and elements in general

Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
パルスレーザアブレーション

About パルスレーザアブレーション

, 
水素

About 水素

, 
DLC

About DLC

, 
薄膜蒸着

About 薄膜蒸着

, 
実験

About 実験


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