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J-GLOBAL ID:200902151547187652   Reference number:02A0909712

DLCダイヤモンド膜 DLC膜の密着性向上技術

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Volume: 47  Issue: 11  Page: 809-814  Publication year: Nov. 15, 2002 
JST Material Number: F0390A  ISSN: 0915-1168  CODEN: TORAEO  Document type: Article
Article type: 解説  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Thin films of other inorganic compounds  ,  Lubrication in general 
Reference (17):
  • 日本機械学会基準JSME S 010. 1996
  • AISENBERG, S. J. Appl. Phys. 1971, 42, 2953
  • KOIDL, P. Mater. Sci. Forum. 1989, 52/53, 41
  • TAMOR, T. A. J. Appl. Phys. 1994, 76, 3823
  • 市村博. 表面技術. 2000, 51, 4, 384
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