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J-GLOBAL ID:200902151776742007   Reference number:95A0129994

Development of Air Spindles for Ultra Precision Machining.

超精密加工用エアスピンドルの開発
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Volume: 50  Issue:Page: 58-70  Publication year: Dec. 1994 
JST Material Number: F0439A  ISSN: 0429-8349  CODEN: FJERA  Document type: Article
Article type: 解説  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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