Art
J-GLOBAL ID：200902152092547996   Reference number：94A0496844

Real-time optical diagnostics for epitaxial growth.

エピタキシャル成長の実時間光学診断
Author (1)：
ASPNES D E

About ASPNES D E

(North Carolina State Univ., NC, USA)

About North Carolina State Univ., NC, USA


Material：
Surface Science  (Surface Science Letters)

About Surface Science


Volume： 307/309  Issue： Pt B  Page： 1017-1027  Publication year： Apr. 20, 1994 
JST Material Number： C0129B  ISSN： 0039-6028  Document type： Article
Article type： 文献レビュー  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
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epitaxy

About epitaxy

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
IRAS

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,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Thin films in general 
(BK14010X)

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Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
エピタキシャル成長

About エピタキシャル成長

, 
実時間

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, 
光学診断

About 光学診断


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