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J-GLOBAL ID：200902152920609801   Reference number：99A0245614

Deposition and Patterning Technique for Realization of Pb(Zr_0.52, Ti_0.48)O₃ Thick Film Micro Actuator.

Pb(Zr_0.52,Ti_0.48)O₃厚膜マイクロアクチュエータ実現のための堆積法とパターニング法

Author (6)： MAEDA R (Agency of Industrial Sci. and Technol., Ministry of International Trade and Ind., Ibaraki, JPN) ,  WANG Z (Agency of Industrial Sci. and Technol., Ministry of International Trade and Ind., Ibaraki, JPN) ,  CHU J (Agency of Industrial Sci. and Technol., Ministry of International Trade and Ind., Ibaraki, JPN) ,  AKEDO J (Agency of Industrial Sci. and Technol., Ministry of International Trade and Ind., Ibaraki, JPN) ,  ICHIKI M (Agency of Industrial Sci. and Technol., Ministry of International Trade and Ind., Ibaraki, JPN) ,  YONEKUBO S (Agency of Industrial Sci. and Technol., Ministry of International Trade and Ind., Ibaraki, JPN)
Material： Japanese Journal of Applied Physics. Part 1. Regular Papers, Short Notes & Review Papers  (Japanese Journal of Applied Physics. Part 1. Regular Papers, Brief Communications & Review Papers)
Volume： 37  Issue： 12B  Page： 7116-7119  Publication year： Dec. 1998 
JST Material Number： G0520B  ISSN： 0021-4922  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： thick film ,...
Semi thesaurus term： *PZT

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JST classification (1)： Manufacturing technology of solid-state devices  (NC03030V)

Reference (6)：

• 1) O. Auciello and R. Ramesh (ed.): Electroceramic Thin Films, Part I: Processing, MRS Bull., Special Issue June 1996.
• 2) C. Lee, S Kawano, T. Itoh and T. Suga: J. Mater. Sci. 31 (1996) 4559.
• 3) R. Maeda and K. Kikuchi: Surf. Eng. 13 (1997) 71.
• 4) J. Akedo, M. Ichiki, K. Kikuchi and R. Maeda, Proc of IEEE Workshop of MEMS (1997) p. 135.
• 5) A. Schroth, M. Ichiki, R. Maeda and J. Akedo: Proc. SPIE 3242 (1997) 380.

Terms in the title (6)： Pb ,  O3 ,  厚膜 ,  マイクロアクチュエータ ,  堆積 ,  パターニング