Art
J-GLOBAL ID:200902153096225990   Reference number:00A0655990

A low-power 2.45 GHz microwave induced helium plasma source at atmospheric pressure based on microstrip technology.

マイクロストリップ技法に基づく大気圧での低パワー2.45GHzマイクロ波誘導ヘリウムプラズマ源
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Material:
Volume: 15  Issue:Page: 579-580  Publication year: Jun. 2000 
JST Material Number: C0770C  ISSN: 0267-9477  CODEN: JASPE2  Document type: Article
Article type: 短報  Country of issue: United Kingdom (GBR)  Language: ENGLISH (EN)
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Plasma devices  ,  Spectroanalysis 

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