Preparation and Characterization of Epitaxial Lead Zirconate Titanate Films on Pt/(Ti, Al)N/TiN/Si Substrates by Metalorganic Chemical Vapor Deposition.

SAKURAI A; LI X M; SHIRATSUYU K; TANAKA K; SAKABE Y

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J-GLOBAL ID：200902153103008770 Reference number：00A1007624

Preparation and Characterization of Epitaxial Lead Zirconate Titanate Films on Pt/(Ti, Al)N/TiN/Si Substrates by Metalorganic Chemical Vapor Deposition.

有機金属化学気相成長によるPt/(Ti,Al)N/YiN/Si基板上へのジルコニウムチタン酸鉛エピタキシャル膜の作製と評価

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Material：
Volume： 39 Issue： 9B Page： 5441-5445 Publication year： Sep. 30, 2000
JST Material Number： G0520B ISSN： 0021-4922 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： ENGLISH (EN)

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Ferroelectrics,antiferroelectrics and ferroelasticity , Oxide thin films

Reference (7)：

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5) X. M. Li, K. Shiratsuyu, K. Tanaka and Y. Sakabe: Mater. Res. Soc. Jpn. 24 (1999) 59.

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