Art
J-GLOBAL ID:200902153650925214   Reference number:93A0772731

Crystallization and decomposition of co-sputtered amorphous silicon-aluminum thin films.

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Material:
Volume: 35  Issue:Page: 99-113  Publication year: Sep. 1993 
JST Material Number: E0934A  ISSN: 0254-0584  Document type: Article
Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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