Effect of laser irradiation on the properties of indium tin oxide films deposited at room temperature by pulsed laser deposition.

ADURODIJA F O; IZUMI H; ISHIHARA T; YOSHIOKA H; MOTOYAMA M; MURAI K

Art

J-GLOBAL ID：200902153789226191 Reference number：02A0790588

Effect of laser irradiation on the properties of indium tin oxide films deposited at room temperature by pulsed laser deposition.

室温においてパルスレーザ蒸着により堆積した酸化インジウムすず薄膜の特性に及ぼすレーザ照射の影響

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Material：
Volume： 67 Issue： 2 Page： 209-216 Publication year： Sep. 13, 2002
JST Material Number： E0347A ISSN： 0042-207X Document type： Article
Article type：原著論文 Country of issue： United Kingdom (GBR) Language： ENGLISH (EN)

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Oxide thin films , Electric conduction in crystalline semiconductors

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