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J-GLOBAL ID:200902154088718959   Reference number:02A0795012

Surface Roughness of Microstructures Fabricated by LIGA Process.

LIGAプロセスにより作製した微細構造の表面粗さ
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Volume: 19th  Page: 263-266  Publication year: May. 30, 2002 
JST Material Number: X0768A  Document type: Proceedings
Article type: 原著論文  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Manufacturing technology of solid-state devices 
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