Art
J-GLOBAL ID：200902154263857568   Reference number：94A0211869

Preparation of ITO Thin Films by Sol-Gel Method.

ゾル・ゲル法によるITO薄膜の作製
Author (3)：
FURUSAKI TSUYOSHI

About FURUSAKI TSUYOSHI

(北大 工)

About 北大 工

, 
TAKAHASHI JUN'ICHI

About TAKAHASHI JUN'ICHI

(北大 工)

About 北大 工

, 
KODAIRA KOHEI

About KODAIRA KOHEI

(北大 工)

About 北大 工


Material：
日本セラミックス協会学術論文誌  (Journal of the Ceramic Society of Japan)

About 日本セラミックス協会学術論文誌


Volume： 102  Issue： 2  Page： 200-205  Publication year： Feb. 1994 
JST Material Number： F0382A  ISSN： 0914-5400  CODEN： JCSJEW  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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indium oxide

About indium oxide

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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peptization

About peptization

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Oxide thin films 
(BK14050P)

About Oxide thin films

,  Applied physicochemical processes and equipment 
(XE03000E)

About Applied physicochemical processes and equipment

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
ゾル・ゲル法

About ゾル・ゲル法

, 
ITO薄膜

About ITO薄膜

, 
作製

About 作製


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