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J-GLOBAL ID:200902154583574270   Reference number:00A0000565

Three-dimensional surface measurement using grating projection method by detecting phase and contrast.

位相とコントラストの検出による格子投影法を用いる3次元表面測定
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Material:
Volume: 3740  Page: 114-117  Publication year: 1999 
JST Material Number: D0943A  ISSN: 0277-786X  CODEN: PSISDG  Document type: Proceedings
Country of issue: United States (USA)  Language: ENGLISH (EN)
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