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J-GLOBAL ID：200902156065502528   Reference number：98A0863190

Femtosecond laser material processing.

フェムト秒レーザー加工
Author (1)：
KUMAGAI HIROSHI

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(理研)

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Material：
応用物理  (JSAP International)

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Volume： 67  Issue： 9  Page： 1051-1055  Publication year： Sep. 1998 
JST Material Number： F0252A  ISSN： 0369-8009  CODEN： OYBSA  Document type： Article
Article type： 解説  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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*laser beam machining

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Laser irradiation effects and damages 
(BK16040S)

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フェムト秒レーザー加工

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