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J-GLOBAL ID:200902156804233832   Reference number:98A0736288

Advances in PSII techniques for surface modification.

表面改質のためのPSII技術の進歩
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Volume: 103/104  Page: 205-211  Publication year: May. 1998 
JST Material Number: D0205C  ISSN: 0257-8972  Document type: Article
Article type: 原著論文  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Applications of electron beams and ion beams  ,  Applications of plasma  ,  Techniques and equipment of thin film deposition 
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